Nanometrology is a study of measurement at the nanoscale level. Nanometrology has a vital role in the production of nanomaterials which have a high degree of reliability and accuracy in nano manufacturing. Piezoactuators are one of the major drivers for the growth of the nano positioning market. The effects caused in piezoelectric material are responsible for a nonlinear motion with hysteresis. In order to achieve exceptional linearity, repeatability, and stability required for nanopositioning, a location control is used. Nano positioning systems needs precisions in the range of few nanometers and lower. Nano positioning systems essentially demand a position measurement technique that can detect signal in this range as well. Some of the primary specifications that are needed for selecting an apt methodology are resolution (sensitivity), bandwidth, linearity, and stability. Additionally, the capability to record the motion directly is another important factor that needs...